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TESCOM™ 12 Series Springless Threadless Pressure Regulator
12-IGS
12-VCR
12 Series is a miniature ultra high purity IGS/VCR® pressure reducing regulator.
The 12 Series offers 5 Ra or 10 Ra microinch finishes, tied diaphragm and internally springless and threadless design. It provides inlet pressures of 150 psig / 10.3 bar, outlet pressure from 250 mm Hg-15, 30, 60, 100 psig / 250 mm Hg-1.0, 2.1, 4.1, 6.9 bar with flow rates up to 120 SLPM. Ideal for use in OEM tools, gas boxes and low-pressure gas cabinets.
TESCOM™ 12 Series Springless Threadless Pressure Regulator

Specs

Pressure Rating
Maximum Inlet Pressure:
150 psig / 10.3 bar

Maximum Outlet Pressure:
250 mm Hg-15 psig / 250 mm Hg-1.0 bar
0-30, 0-60, 0-100 psig / 0-2.1, 0-4.1, 0-6.9 bar
Material
Body: 316L VAR Stainless Steel
Diaphragm: Hastelloy®
Seat: PCTFE
Valve Stem: Hastelloy®
Remaining Materials: 316L VAR Stainless Steel
Operating Temperature
-40°F to 140°F / -40°C to 60°C
Connections
Welded Fittings: 1/4 VCR® or Tube Stubs
Surface Mount: 1.125 or 1.50 footprint
Flow Capacity
Standard: Cv = 0.04
High Flow: Cv = 0.08
Weight
VCR®, IGS: 0.60 lb / 0.3 kg
A-Style: 1.08 lbs / 0.5 kg
Additional Information
For custom modifications or a complete system solution, please contact your local sales office.

Features

  • Product of choice for state-of-the-art OEM gas systems
  • Ultra-sensitive pressure control enhances MFC performance
  • Superior performance in a wide range of applications
  • Flows from 2 SCFM to 120 SLPM
  • Unsurpassed droop and repeatability in a micro component
  • Metal-to-metal diaphragm to body seal for high leak integrity
  • 10 Ra or 5 Ra microinch internal surface finish
  • Meets SEMI F19 and SEMI Modular Interface specifications