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TESCOM™ 64-5000 Series Subatmospheric Pressure Regulator
64-5000
64-5000 Series ultra high purity, absolute / subatmospheric pressure reducing regulator offers a 10 Ra surface finish.
Inlet pressures are 120, 600, or 3500 psig / 8.3, 41.4, or 241 bar with outlet pressures ranges from 50 mm Hg absolute - 15 to 100 psig / 50 mm Hg absolute - 1.0 to 6.9 bar. Ideal for use in vacuum pressures control, toxic gas analysis, valve manifold boxes, gas cabinets and semiconductor manufacturing.
TESCOM™ 64-5000 Series Subatmospheric Pressure Regulator

Specs

Pressure Rating
Maximum Inlet Pressure: 120, 600, or 3500 psig / 8.3, 41.4, or 241 bar
Outlet Pressure Ranges: 50 mm Hg absolute -
15, 30, 60, 100 psig / 1.0, 2.1, 4.1, 6.9 bar
Body Material
316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish
Valve Seat
Teflon®, PCTFE
Diaphragm
316L Stainless Steel
Valve Stem, Spring & Valve Guide
316 Stainless Steel
Operating Temperature
Teflon® Seat: -40°F to 160°F / -40°C to 71°C
PCTFE Seat: -40°F to 140°F / -40°C to 60°C
Port Size & Type
1/4 H.P.I.C.
1/4, 1/2 Male Swivel
1/4, 1/2 Female Swivel
IN Port: 1/4 Male; OUT Port: 1/4 Female
IN Port: 1/4 Female; OUT Port: 1/4 Male
1/4 Tube Stubs
Flow Capacity
Cv = 0.24 (120 psig / 8.3 bar model)
Cv = 0.15 (600 psig / 41.4 bar model)
Cv = 0.06 (3500 psig / 241 bar model)
Weight
2 lbs / 0.9 kg
Additional Information
For custom modifications or a complete system solution, please contact your local sales office.

Features

  • Negative bias for controlling vacuum and low positive pressures
  • 10 Ra microinch / 0.25 micrometer internal surface finish
  • Metal-to-metal diaphragm to body seal for high leak integrity
  • Hastelloy® trim option is available